Name
Study on conversion of survived BPDs in epitaxial layer to TEDs
Description
This paper focused on how to convert survived BPDs (basal plane dislocation) to TEDs (threading edge dislocation) in epi-layer after epitaxial growth process. While BPD is not converted to TED by mere heat treatment, the EVC (Expansion-Visualization-Contraction) treatment may convert BPD to TED because the Si core dislocation moves to the C core dislocation to form BPD as in the case that the expanded SSF (Shockley-type stacking faults) contracts during heat treatment.
Speakers
Kazumi Takano - ITES
Date
Tuesday, October 1, 2024
Time
2:40 PM - 3:00 PM
Location Name
Room 305
Track
Characterization I