Name
TaC-based protective coating systems adapted on graphite materials with different thermal expansion for the use in SiC PVT crystal growth
Description

Due to the harsh environment and therefore a great deal of wear, analysts assume that there will be an overall shortage of graphite supply in the SiC manufacturing world. The basic applicability of a high-temperature and corrosion reistant TaC coating, applied by the spray coating technology TACCOTA® developed at Fraunhofer IISB, on graphite reactor components for typical SiC PVT growth environments has been already successfully demonstrated. However, to extend the use of graphite materials with deviating thermal expansion, the thermal stresses which initiate cracks in the coating have to be significantly reduced. The introduction of a crack-free or crack-reduced TaC-based mixed coating layer (MCL), with a varying CTE (cofficient of thermal expansion) lower than pure TaC, is one possible option to lower the degradation degree. In this contribution, it is shown that MCLs have a high potential to overcome the CTE mismatch issue and finally to enable the protection of further non CTE-adapted graphite grades by TaC related coatings.

Speakers
Kevin Schuck-Buehner - Fraunhofer IISB
Date
Tuesday, October 1, 2024
Time
10:10 AM - 10:30 AM
Location Name
Room 305
Track
Bulk Growth 1