Name
Dynamic vs. Quasi-stationary C-V Characterization of MOS Capacitors
Description

The SiC-gate dielectric interface of SiC power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) has to be specifically processed to ensure reliable and highly efficient operation. Namely, the quality of gate dielectric-SiC interface is determined by a presence of (near-) interface traps, leading to reduced channel-carrier mobility and/or threshold voltage drift. This paper presents dynamic capacitor-voltage (C-V) measurements of the metal-dielectric gate stacks, enabling the characterization of the dielectric-semiconductor interface under more device-application relevant conditions than the standard quasi-stationary (QS) C-V measurements.

Speakers
Michel Nagel - Advanced Power Semiconductor Laboratory, ETH Zurich
Date
Tuesday, October 1, 2024
Time
9:50 AM - 10:10 AM
Location Name
Room 306
Track
MOSFET Channel Optimization