Biography

Dr. Michael MacMillan has 25+ years SiC epitaxy experience, R&D and commercial, 60+ SiC/WGB peer reviewed publications, and 3 US patents. He is currently a private consultant (MacMillan Consulting) in the field of SiC materials and epitaxy. Prior to consulting, he was Technical Director, SiC at Veeco, formerly Epiluvac, working on process development for the SiC epitaxy tool while also working with sales and marketing to explain the features and benefits of Veeco tools to customers.  Prior to Veeco, he was the Director of Silicon Carbide Epitaxy at Global Power Technologies Group (a.k.a. SemiQ) where he chose a green site for a SiC epitaxy operation, designed the facility and directed construction, specified equipment, recruited, and trained team, and coordinated the startup of a class 10 clean room with support infrastructure and characterization equipment. He was responsible for all SiC epitaxy operations, including custom epitaxy for R&D and low volume manufacturing. Later, as Chief Epitaxial Scientist he worked to develop next generation epitaxial products and characterization techniques focused on thicker epitaxial layers. Prior to SemiQ, he was the lead Global Applications Engineer and a Senior SiC epitaxy Specialist at Dow Corning, now SK Siltron. He established and enabled SiC epitaxial capability with chlorosilane chemistry and developed and implemented 100 mm and >50 um (5 KV) SiC epitaxy processes. Early in his career he was a SiC Senior Engineer at Northrop Grumman, as well as a visiting scientist at Linköping University in Sweden. He served as a SEMI member leading a SiC resistivity standards group and participating in other SEMI SiC groups. Dr. MacMillan has BS in Physics from Worcester Polytechnic Institute and a PhD in Physics from the University of Pittsburgh, focused on SiC and GaN materials.